Sample True Color 3D Profiler: ZETA-20 Sample True Color 3D Non-Contact Optical Profiler with Multi-Mode Optical Technology, the most advanced 3D imaging and testing system (surface profile measurement equipment tailored for users, the best choice in the field of surface measurement)
##Automatic measurement of fine grid lines and main grid lines ##Single crystal and multi-crystalline silicon texture measurement ## Clear imaging of bare and AR-coated surfaces ## Provides important statistics such as size, height distribution and body surface area ratio
Sample True Color 3D Profiler: ZETA-20 Sample True Color 3D Non-Contact Optical Profiler with Multi-Mode Optical Technology, the most advanced 3D imaging and testing system (surface profile measurement equipment tailored for users, the best choice in the field of surface measurement)
Keywords: ZETA-20 3D non-contact optical profiler 3D microscope
Features
◆ Zeta-20 is a versatile, easy-to-use device
ZDotTM patented technology excels at imaging and analyzing high-roughness, low-reflectivity surfaces
Solar cells with anti-reflective coating Patterned/etched LED substrates Bio-MEMS, MEMS and microfluidic tanks Transparent multi-surface sample imaging
Get data quickly
·Configurable acquisition speed of faster than 10 seconds to scan a 3D image ·Simple and easy-to-learn software interface
Powerful 3D analysis capabilities
Step height, roughness, area, volume, angle and other surface properties Data output format is compatible with common third-party analysis software
◆ High flexibility
Measuring complex surface features
From deep grooves to diamond wire, the Zeta-20’s powerful imaging capabilities enable measurement of complex surfaces that are often too rough, too dark, or too steep to measure with other equipment.
Fully configured options
The types of sample surfaces involved in scientific research are often difficult to predict. Therefore, the Zeta-20 uses a modular design concept to provide users with a range of hardware and software options to meet a variety of different measurement needs. Thin film thickness spectrometer QDIC/Nomarski option for measuring nanometer-level roughness iX5 interferometer objective Piezoelectric ceramic stage with Z-axis resolution up to 2nm Tilt stage and vacuum fixture Automatic feature extraction and measurement software Automatic surface area measurement, statistical analysis... and many other options!
◆ Measurement applications in specific industries
Solar cell surface analysis:
Automatically measure the height, width and volume of the grid line ·Surface area and texture analysis of single crystal silicon and polycrystalline silicon Silicon nitride anti-reflection layer film thickness measurement Multi-point, automatic grid line measurement 156mm solar cell vacuum adsorption stage
LED and Patterned Sapphire Substrate (PSS) Analysis
Automatically measure PSS height, size and period Analyze the PSS characteristics after photoresist and etching Automatically locate and measure the roughness of Mesa after epitaxy Vacuum stages for 2", 4" and 6" wafers
Microfluidics and MEMS Measurement and Analysis
Transparent multi-layer surface profile measurement ·Measurement of deep grooves, deep wells and other feature points with high aspect ratio Flexible and customizable cross-section and measurement point settings
Simple and easy-to-use measurement method
Automatic stage supports multi-point measurement sequence and 3D image stitching Automatic slope and waviness compensation Automatically level the surface to be tested Automatically measure height, size, angle, area and volume Automatic measurement of line roughness and surface roughness
Technical specifications
Performance Configuration
Data acquisition: less than 10 seconds (200-step scan) 3D scanning: more than 30 steps per second Pixel resolution: 0.031μm (1X coupling mirror, 150X objective lens) Z-axis resolution: 0.002 μm (piezoelectric ceramic stage) Repeatability (1σ): 0.006 μm (piezoelectric ceramic stage and anti-vibration table)
Standard Features
Camera options: 640x480, 1024x768, 1280x960 pixels Magnification: 45000X (optical plus digital) Lighting: Dual high brightness white LED Manual stage: 100mm x 100mm XY travel distance Z axis moving distance: 40mm
Advantages
Automatic measurement of fine and main grid lines
Single crystal and multi-crystalline silicon texture measurement
Clear imaging of bare and AR-coated surfaces
Provides important statistics such as size, height distribution and body surface area ratio
Velvet (single crystal silicon pyramid)
Single crystal silicon velvet
Pyramid dimensions, height distribution histograms and important statistics such as pyramid density and volume to surface area ratio are automatically calculated and reported in detail by Zeta Integrated Solar Software.
Velvet (polysilicon corrosion pits)
Polysilicon velvet
Pit size, depth distribution histograms and important statistics such as pit density and volume to surface area ratio are automatically calculated and reported in detail by Zeta Integrated Solar Software.
Fine grid & main grid measurement
Fine line measurement
Zeta’s High Dynamic Range (HDR) imaging system is able to accurately image the 3D profile of fine, highly reflective metal lines deposited on very dark surfaces, and automatically measure important parameters such as line width, height and volume.
Busbar measurement
Zeta's innovative HDR imaging system is the industry's first non-contact optical profiler that can automatically and accurately measure busbar width and height.
Shanghai Sales + Technical Support + After-sales Service Center Rayscience Optoelectronic Innovation Co., Ltd address: 4th Floor, Building 122, Lane 2338, No. 1 Duhui Road, Minhang District, Shanghai Telephone: 021-34635258 021-34635259 fax: 021-34635260 E-mail: saleschina@rayscience.com
