• Materials 3D Real-time Dynamic Microscope MEMS Semiconductor
  • Materials 3D Real-time Dynamic Microscope MEMS Semiconductor

Materials 3D Real-time Dynamic Microscope MEMS Semiconductor

No.DHMR1000
Swiss Lyncee tec's material 3D real-time dynamic microscope DHM R1000 "DHM (Digital Holographic Microscopy) is mainly used for measurement work in MEMS research and development, and for defect detection in production lines. Compared with the confocal microscopes currently used in the above applications, it can measure at a higher speed at the same resolution. The vertical resolution is 0.6nm, and the horizontal resolution is 200nm~300nm (depending on the objective lens). When using a 1.25x objective lens, the field of view is 4mm×4mm, and it can be measured at a speed of 15 frames/second. Therefore, a 1cm square sample can be observed in a few minutes. When using an existing confocal microscope, the same
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3D real-time dynamic microscopy of materials

Digital Holographic Microscopy (DHM) generates, in real-time, high resolution 3D digital images of a sample using the principle of holography. DHM R1000 series Cost-effective sub-nanometer resolution in real-time.

Instrument Introduction

Swiss Lyncee tec's material 3D real-time dynamic microscope DHM R1000 "DHM (Digital Holographic Microscopy) is mainly used for measurement work in MEMS research and development, and for defect detection in production lines. Compared with the confocal microscopes currently commonly used in the above applications, it can perform measurements at a higher speed at the same resolution. The vertical resolution is 0.6nm, and the horizontal resolution is 200nm to 300nm (depending on the objective lens). When using a 1.25-magnification objective lens, the field of view is 4mm×4mm, and it can be measured at a speed of 15 frames/second. Therefore, a 1cm square sample can be observed in a few minutes. When using existing confocal microscopes, observations of the same range take several hours to 10 hours. In addition, the product can expand the observation speed to a maximum of 10,000 frames/second. Due to the high photography speed, no vibration reduction table is required, and it can be used to detect products on the assembly line.

The interference pattern between the light irradiating the sample and the reference light is recorded as digital data by a CCD camera, and three-dimensional data is calculated from it. The dedicated software "Koala Software" is used to calculate the three-dimensional data.

Main Features :

  • Non-contact 3D imaging
  • Phase measurement possible
  • Automatic coherence compensation
  • High resolution, real-time measurement

Technical specifications

system

  • Measurement technology: Single wavelength transmission digital holographic microscope
  • Imaging type: Intensity and quantitative phase contrast (DHM mode)
  • Light source: single wavelength laser
  • Sample stage: Manual or automatic XYZ stage, travel 200mm××100mm×15mm
  • Camera: 1392×1040 pixels, 8 bits
  • Effective objective lens: standard microscope objective lens, long working distance objective lens, oil objective lens or water objective lens

performance

  • Vertical resolution: 10nm
  • Vertical measurement range: up to 340nm (depending on the sample)
  • Lateral resolution: 300nm (1.4NA)
  • Field of view: 4.4mm
  • Working distance: 0.3~18mm
  • Digital focus range: up to 50 times depth of field
  • Capture time: less than 1us
  • Spatial sampling: 1024×1024 pixels
  • Sampling rate: 15fps (1024×1024 pixels)
  • Single wavelength reconstruction rate: 15fps (512×512 pixels), 4fs (1024×1024 pixels)
  • Sample illumination: less than 1uW/cm2
  • Maximum sample size: 200mm×200mm

Power Requirements

  • Input voltage: 85-260VAC, 50/60Hz
  • Power: 480W

Weight & Dimensions

  • Microscope: 500×500×500mm&34.5kg
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