Zeta-300 Optical Profiler Surface Profile Testing System

The most advanced 3D imaging and testing system (surface profile measurement equipment tailored for users, the best choice in the field of surface measurement) Zeta 3D optical profiler can test samples of almost all materials and structures, from low-reflectivity and high-roughness solar cells to high-precision polished disk media, and even micromechanical components with high aspect ratio structures and multi-layer microfluidic devices. Zeta's strong R&D capabilities also provide equipment customization services for special applications. Precision optical testing systems and flexible and automatic test software packages make users' testing work more flexible and simple.

Application Areas
The Zeta-300 test system supports multi-functional test options and can be equipped with automated robotic arms, fully automatic analysis software, etc. according to actual customer needs. The high-precision and high-repeatability equipment performance is the best choice for scientific research and industrial production. The following are examples of practical applications:



◆ LED, PSS & defect monitoring

AOI defect testing of PSS and PR pattern height, width and period, including flat wafer, PSS wafer, PR wafer, epitaxial wafer 2-inch, 4-inch and 6-inch vacuum stage

◆ Microfluidics and MEMS device structure analysis

Analysis of transparent or semi-transparent multi-layer structures Analysis of high aspect ratio structures, such as deep trenches and deep wells Flexible test tools, such as cursors and cross-sections

◆ Automated testing software package

Multi-point automatic sequence measurement
·3D imaging with various fields of view
Automatic image scanning and stitching
Automatic tilt and waviness compensation
Automatic reference surface leveling for automatic height, size, angle and area measurements.

Features

◆ Multifunctional optical test module

The Zeta-300 test system provides a variety of optical test technologies to meet the test needs of users in various fields:
ZdotTMZ patented 3D imaging technology is standard for all Zeta products
ZIC interference contrast imaging technology enables imaging and quantitative analysis of sub-nanometer roughness surfaces
ZSI white light differential interferometry technology, with any objective lens, can achieve ultra-high resolution measurement in the Z direction
Zx5 white light interferometry technology. While ensuring high-resolution measurement in the Z direction, it also provides measurement and statistical analysis within a large field of view.

◆ Fast testing speed

3D scanning imaging and statistical analysis of all types of samples can be completed within 1 minute, and its ultra-high resolution can even image nano-level defects.

◆ Easy to operate

Automated test procedures, one-click operation process, simple test menu settings, 30-minute training, and intuitive result output.

◆ Powerful functions

Supports all Zeta testing technologies to meet users’ testing needs for different samples, including Zeta’s existing optical profile testing technology, roughness and step height testing technology, etc.

Technical specifications

Product size (mm)

System (L x W x H): 510 x 725 x 773
Host: 381x457x102
Display: 596x449x240
Total weight: 145lbs/65kg

Operation Specifications

Voltage: 100-230VAC
Current: 4A
Working temperature: 18-30oC, non-condensing, ±1℃ per hour

Performance Configuration

3D imaging: ~1 sec/dot (ZiC) ~10 sec/dot (ZSi) ~25 sec/dot (ZDot)
Pixel resolution: 0.09μm (0.5x coupling lens with 100x objective lens)
Minimum Z-axis step: 2nm (piezoelectric ceramic stage) 13nm (Z-axis precision screw drive)
Z-axis resolution: 0.5 (ZSi)
13nm(Zdot)
Repeatability 3: 7nm (1σ)

System Configuration

Camera options: 640x480, 1024x768, 1280x960
Total magnification: 35,000x (optical and digital magnification)
System light source: 3 high-power white light LEDs
Automatic stage: 150mmx150mm (XY direction)
Z axis test range: 40mm