WCT-IL800 System Capabilities  Primary application: Step-by-step monitoring and optimization of the production line, using measurements on product wafers at key stages in the process. Example applications: |
Integration Overview We welcome inquiries from automation vendors who require a reliable and cost-effective inline lifetime measurement, with professional support and training. We also work directly with R&D and other small fabs and their choice of automation supplier to integrate the WCT-IL800 into any metrology workstation. The standard operating software has allowances for rapid prototyping and testing upon delivery. In the automated mode, the software client offers vital wafer results to a server database, using options such as a local OPC server or Profibus interface. Sinton Instruments’ characteristic reports of minority-carrier dependent lifetime are also standard. |
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| • | Monitoring incoming wafer quality (lifetime, sheet resistance, and trapping) |
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| • | Monitoring phosphorus diffusion quality |
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| • | Early detection of wafer contamination from water, chemicals, furnaces, or wafer handling during the process | ||
| • | Maintaining optimal surface passivation quality from the nitride deposition | ||
