MProbe Vis
Micro-point film thickness optical measuring instrument
MProbe makes you a measurement expert!
Most translucent or slightly absorbing films can be measured quickly and reliably: oxides, nitrides, photoresists, polymers, semiconductors (Si, aSi, polySi), hard coatings (SiC, DLC), polymer coatings (Paralene, PMMA, polyamide), thin metal films, etc.
MProbe System
|
Accuracy |
0.01nm or 0.01% |
|
Accuracy |
0.2% or 1nm |
|
stability |
0.02nm or 0.03% |
|
Spot size |
Standard is 3mm, as low as 3μm |
|
Sample size |
From 1 mm |
Thickness range: 15 nm-50 um
Wavelength range: 400nm -1100nm
LCD, FPD applications: ITO, cell gap, polyamide. Optical coatings: dielectric filter, hard coating, anti-reflection coating Semiconductors and electrolytes: oxides, nitrides, OLED stacks
Real-time measurement and analysis. Various multi-layered, thin, thick, independent and uneven layers.
Rich material library (More than 500 materials) – New materials can be easily added. Cauchy, Tauc-Lorentz, Cody-Lorentz, EMA, etc.
Flexible use: Research and development can be carried out on the operating table or on site via the Internet.
It can be easily connected to external systems using TCP or Modbus interface.
Measurement parameters: Thickness, optical constants, surface roughness.
Friendly and powerful interface: The measurement and analysis setup is simple.
Useful tools: Simulation and sensitivity analysis, background and scaling correction, connecting layers and materials, multi-sample measurements, dynamic measurements and production batch processing.
Measurement of 300 nm silicon oxide film Measurement and model data fitting
Main parameters
Original reflectance from silicon wafer. Signal maximum (16 bits).
Integration time: 10ms
|
Spectral range (nm) |
400-1100 |
|
Spectrometer/Detector |
Spectrometer F4, Si CCD 3600 pixels, 16-bit ADC, |
|
Spectral resolution |
<2 nm (标准) |
|
light source |
Halogen lamp (Xe filled) 5W, CT 2800o |
|
Reflectance detection |
Optical fiber (7 fiber bundles), |
|
Accuracy |
<0.01 nm or 0.01% |
|
Accuracy |
<1nm或0.2% |
|
weight |
4 kg |
|
size |
8”x 10”x 4” (WxDxH) |
|
power |
100-250VAC, 50/60 Hz |
Measuring 500nm AlN. Measurement parameters: thickness and surface roughness. Conversion factor applied to correct distance for changed configuration.
|
Optional Hardware |
|
|
-FLVis |
Vis achromatic focusing lens. WD:35mm. Light board size: <0.5mm. |
|
-LP500 |
Long pass filter, wavelength range below 500nm. |
|
-FD Holder |
Sample holder facing downwards. For measuring transparent and flexible samples |
|
-TO |
Optional transmittance |
|
-TO Switch |
2-channel switch, combined measurement of reflectance and transmittance. |
|
- 2oW |
Change to 20W (CT 3100o, use time 2000hrs) Tungsten halogen lamp . |
|
-HR |
Upgrading the spectrometer resolution<1nm |
|
-TR |
5V TTL at input/output trigger. 1 external (input) |
|
Software Options |
|
|
-MOD |
Remote control based on Modbus standard (TCP) |
|
-CM |
Different measurements with a specified number of measurements and/or delays |
