• Thin Film Measurement Systems
  • Thin Film Measurement Systems

Thin Film Measurement Systems

No.G4FBF0187E325A
Most translucent or slightly absorbing films can be measured quickly and reliably:

Oxides, nitrides, photosensitive corrosion-resistant films, polymers, semiconductors (Si, aSi, polySi), semiconductor compounds (AlGaAs, InGaAs, CdTe, CIGS), hard coatings (SiC, DLC), polymer coatings (Paralene, polymethyl methacrylate, polyamide), thin metal films, etc.
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MProbe Thin Film Measurement System

M probe makes you a measurement expert!

Most translucent or slightly absorbing films can be measured quickly and reliably:

Oxides, nitrides, photosensitive corrosion-resistant films, polymers, semiconductors (Si, aSi, polySi), semiconductor compounds (AlGaAs, InGaAs, CdTe, CIGS), hard coatings (SiC, DLC), polymer coatings (Paralene, polymethyl methacrylate, polyamide), thin metal films, etc.

Thickness range: 1 nm-1 mm
Wavelength range: 200nm -5000nm

Application in thin film solar cells:

aSi, TCO, CIGS, CdS, CdTe - Full Solar Stack Measurements

LCD, FPD Applications:

ITO, intercellular space, polyamide.

Optical coating:

Dielectric filters, hard coatings, anti-reflective coatings Semiconductors and electrolytes: oxides, nitrides, OLED stacks.

Real-time measurement and analysis of various multi-layered, high-strength, thick, independent and uneven layers.

Rich material library (more than 500 materials) – new materials can be easily added.

Support for parametric materials:

Cauchy, Tauc-Lorentz, Cody-Lorentz, EMA, etc…

Flexible use:

It can be connected to the network to conduct research and development on the operating table or on site. It can be easily connected to external systems using TCP or Modbus interfaces.

Measurement parameters:

Thickness, optical constants, surface roughness.

Friendly and powerful interface:

Easy measurement and analysis setup. Background and scale correction, linking of layers and materials.






Offline data analysis:

Simulation and sensitivity analysis, multi-sample measurement, production batch processing.



MProbe system diagram

Accuracy 0.01nm or 0.01%
Accuracy 0.2% or 1 nm
stability 0.02nm or 0.03%
Spot size The standard is 3mm, and can be as small as 3μm
Sample size From 1mm


Main parameters

Model wavelength Range Spectrometer Detectors/Detectors/Light Sources Thickness range*
VIS 400-1100 nm Spectrometer F4/Si 3600 pixels/
Tungsten-halogen light source
15 nm to 20 mm
(option:up to 50 mm)
UVVisSR 200-1100 nm Spectrometer F4/ Si CCD 3600
Pixel/deuterium-tungsten halogen combined light source
3 nm to 20 mm
(option:up to 50 mm)
HRVIS 700-1000 nm HR spectrometer F4/Si 3600 pixels/
Tungsten-halogen light source
1 mm to 400 mm
NIR 900-1700nm Transmission Spectrometer (TVG)
F2/512 InGaAs/Tungsten-Halogen Light Source
100 nm-200 mm
VISNIR 400-1700 nm Spectrometer F4 Si CCD 3600 pixels
(Vischannel); Transmission spectrometer (TVG)
F2/512 InGaAs
PDA (NIR channel) tungsten-halogen light source
15 nm to 200 mm
UVVISNIR 200 -1700 nm Spectrometer F4 Si CCD 3600
Pixel (Vis channel); transmission
Deuterium-tungsten halogen combined light source
3 nm -200 mm
NIRScan 900nm -5000nm Scanning spectrometer/InGaAs/
MCT detector (scan time < 60 seconds)
TH-SiN light source
100 nm -800 mm
XT XT 1590nm -1650nm Transmission Spectrometer (TVG)
F2/512 InGaAs/Tungsten-Halogen Light Source
10 mm - 1 mm

* T, n & k are measured in the thickness range of 25nm – 5um
Other configurations are possible, and OEM inquiries and custom development projects are welcome.
All system accessories have a one-year quality guarantee.
Shanghai Sales + Technical Support + After-sales Service Center
Rayscience Optoelectronic Innovation Co., Ltd

address: 4th Floor, Building 122, Lane 2338, No. 1 Duhui Road, Minhang District, Shanghai
Telephone:
021-34635258 021-34635259
fax:
021-34635260
E-mail:
saleschina@rayscience.com

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