Secondary ion mass spectrometry is the most cutting-edge surface analysis technology. It reveals the chemical composition of the true surface and near-surface atomic layers. The amount of information it contains far exceeds that of simple elemental analysis and can be used to identify the molecular structure of organic components. Secondary ion mass spectrometry is widely used in microelectronics, chemical technology, nanotechnology, and life sciences. It can scan and analyze local areas of a surface within seconds to generate a surface composition map.
principle : Bombard the surface with a primary ion beam, sputtering the atoms on the sample surface into charged ions, and then use a mass spectrometer composed of a magnetic analyzer or a quadrupole mass filter to analyze the charge/mass ratio of the ions to know the surface composition; Very sensitive Surface composition analysis For some elements, the ppm level can be reached; however, due to the large difference in the secondary ion values of various elements, Quantitative analysis is very difficult Secondary ion mass spectrometry is the most cutting-edge surface analysis technology. It reveals the chemical composition of the true surface and near-surface atomic layers. The amount of information it contains far exceeds that of simple elemental analysis and can be used to identify the molecular structure of organic components. Secondary ion mass spectrometry is widely used in microelectronics, chemical technology, nanotechnology, and life sciences. It can scan and analyze local areas of a surface within seconds to generate a surface composition map.
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