Applications: Manual measurement of electron mobility (EM) during semiconductor and solar manufacturing processes.
Equipment Features: The CRS4000 mobility tester is used to manually measure electron mobility (EM) during semiconductor and solar manufacturing processes. It uses non-contact testing and is suitable for process development, prototypes, low-volume production and small-volume production. Researchers can measure electron mobility after each epitaxial layer deposition, with a measurement range of approximately 300–20,000 cm2/Vsec, and a measurement range of sheet resistance from ~100 Ω/square to 3 kΩ/square. The device also has process mapping capabilities. The CRS4000 replaces the currently widely used Van Der Pauw four-point probe method, Hall effect, parallelepiped or bridge method to measure electron mobility, carrier density, carrier concentration and sheet resistance. Compared to those commonly used destructive test methods, the CRS4000 is non-destructive and can provide critical, accurate in-situ process control measurements.
Shanghai Sales + Technical Support + After-sales Service Center Rayscience Optoelectronic Innovation Co., Ltd address: 4th Floor, Building 122, Lane 2338, No. 1 Duhui Road, Minhang District, Shanghai Telephone: 021-34635258 021-34635259 fax: 021-34635260 E-mail: saleschina@rayscience.com
