Step meter ET200/Step meter

KOSAKA LAB ET 200

Micro-profile measuring machine (probe contact type step profiler)

Kosaka Research Institute Co., Ltd. KOSAKA ) is 1950 The company was founded in 1991 and was the first in Japan to publish an optical

Dry lever surface roughness tester is a professional manufacturer with a long history and technical background , Mainly determination / automatic / Fluid Three

Large department. Among them, the measurement department is the most representative unit and occupies an irreplaceable position in Japan's precision measurement industry.

Equipment Features :

KOSAKA ET 200 based on Windows XP The operating system provides comprehensive topographic analysis for a variety of different surfaces, including

Including semiconductor silicon wafers, solar silicon wafers, thin film magnetic heads and disks, MEMS , optoelectronics, surface finishing, biomedical devices

Parts, Film / Chemical coatings and flat panel displays, etc. Use diamond probe to measure the contact surface to achieve high precision

Surface morphology analysis applications. ET 200 Can accurately and reliably measure surface step morphology, roughness, waviness, wear

Various surface morphology technical parameters such as thickness, film stress, etc.

ET 200 Equipped with various types of probes, providing probes that can control contact force and vertical range through programs, color CCD

The in-situ acquisition design allows you to directly observe the working status of the probe, making it easier and more accurate to locate the test area.

Specification

1. Determination of workpiece:

1. Maximum workpiece size: φ 160mm

2. Maximum workpiece thickness ? : 50mm

3. Maximum workpiece weight: 2kg

2. Detector ( pick up ):

1. Z Direction determination range: Max. 600 μ m

2. Z Directional resolution: 0.1nm

3. Determination ? : min.1mgf,max.50mg

4. Stylus radius: 2 μ m

5. Drive mode: Direct drive

6. Reproducibility: 1 σ = 1nm

three, X axis ( Reference axis ) :

1. Movement ( Maximum length ) : 100mm

2. Moving true straight ? : 0.2 μ m/100mm

3. move , Measurement speed ? : 0.02 ~ 10mm/s

4. Linear scale (linar scale) ：Decomposition energy 0.1 μ m

Four, Z axis:

1. Movement: 50mm

2. Movement speed: max.2mm/S

3. Automatic stop function of detector

4. Position determines the decomposition energy: 0.2 μ m

5. Workpiece table:

1. Workpiece table size: φ 160mm

2. Mechanical manual tilt: ± 1mm/150mm

? , Workpiece observation: max.110 times ( Other high magnification options available ? CCD)

7. Bed platform: Made of granite

8. Anti-vibration table ( Purchase ) : ? Floor or table type

IX. Power supply: AC100V ± 10%,

50/60HZ, 300VA

10. Appearance size and weight of the main body:

W494 × D458 × H610mm, 120kg

( ? With anti-vibration table )

KOSAKA LAB ET 200 Step Meter

Equipment features:
Based on Windows XP operating system, KOSAKA ET 200 provides comprehensive morphology analysis for a variety of different surfaces, including semiconductor silicon wafers, solar silicon wafers, thin film heads and disks, MEMS, optoelectronics, precision machining surfaces, biomedical devices, thin film/chemical coatings and flat panel displays. Use diamond tip contact measurement to achieve high-precision surface topography analysis applications. ET 200 can accurately and reliably measure various surface morphology parameters such as surface step morphology, roughness, waviness, wear, film stress, etc.
ET 200 is equipped with various models of testers, providing probes that can control the contact force and vertical range through programs, and a color CCD in-situ acquisition design, which can directly observe the working status of the tester and locate the test area more conveniently and accurately.

Specification
1. Determination of workpiece:
1. Maximum workpiece size: φ160mm
2. Maximum workpiece thickness: 50mm
3. Maximum workpiece weight: 2kg

2. Detector (pick up):
1. Z direction measurement range: Max. 600μm
2. Z-direction resolution: 0.1nm
3. Measuring force: min.1mgf, max.50mg
4. Stylus radius: 2 μm
5. Driving mode: direct drive
6. Reproducibility: 1σ = 1nm

3. X-axis (reference axis):
1. Travel distance (maximum measurement length): 100mm
2. Moving straightness: 0.2μm/100mm
3. Movement and measurement speed: 0.02 ~ 10mm/s
4. Linear scale: Resolution 0.1μm

4. Z axis:
1. Travel distance: 50mm
2. Moving speed: max.2mm/S
3. Automatic stop function of the detector
4. Position determines resolution: 0.2μm

5. Workpiece table:
1. Workpiece table size: φ160mm
2. Mechanical manual tilt: ± 1mm/150mm

6. Workpiece observation: max.110 times (other high magnification CCD can be purchased)

7. Bed platform: Made of granite

8. Anti-vibration table (optional): floor-standing type or table-top type

9. Power supply: AC100V±10%, 50/60HZ, 300VA

10. Dimensions and weight: W494×D458×H610mm, 120kg (excluding anti-vibration platform)

Please contact us for specific models and technical requirements.