Deep level transient spectrometer is an important technical means for the research and detection of semiconductor impurities, deep defect levels, interface states, etc. in the semiconductor field! Test functions: capacitance mode, constant capacitance mode, current mode, (double correlation mode), Zerbst mode, photoexcitation mode, FET analysis, MOS analysis, isothermal transient spectrum, Trap profiling, capture cross section measurement, I/V, I/V(T) Charleson Plot analysis, C/V, C/V(T), TSC/TSCAP, photon-induced transient spectrum, DLOS; The deep energy level transient spectrum measured by the transient capacitance (△C~t) technology of semiconductor PN junction, gold-semi contact structure Schottky junction and the emissivity window technology of deep energy level transient spectrum is a kind of